Headway Research, Inc. PWM32-RS-790 Series Photoresist Spinner

The PWM32-RS-790 spinner provides a versatile equipment to meet a complete range of spinner requirements int eh semiconductor industry. It is possible to coat substrates with adjustable spinning speeds from 50 up to 10,000 rpm for relatively light loads such as silicon wafers, small photomasks, etc. and substrates up to 5-inch maximum diameter.

The microprocessor sequence controller allows up to 9 steps in a single recipe and memory for up to 10 user-defined recipes.